Electrochemical Analysis of Film Forming Mechanisms Relevant to Data Storage Chemical Mechanical Planarization

Nickel- Phosphorous (NiP) substrates have been used as computer hard disk drive media. This research focused on designing slurries that chemically removed the NiP in a non-corrosive pH range through additives. Electrochemical techniques were developed to probe the impact of organic additives on the surface redox and film forming mechanisms.